Figure 4From: Atom-to-atom interactions for atomic layer deposition of trimethylaluminum on Ga-rich GaAs(001)-4 × 6 and As-rich GaAs(001)-2 × 4 surfaces: a synchrotron radiation photoemission studyAnalysis of the core-level spectra influenced by 1 cycle of TMA and H 2 O exposure. (a) Al 2p, (b) As 3d, and (c) Ga 3d states.Back to article page