Figure 5From: Atom-to-atom interactions for atomic layer deposition of trimethylaluminum on Ga-rich GaAs(001)-4 × 6 and As-rich GaAs(001)-2 × 4 surfaces: a synchrotron radiation photoemission studyAnalysis of the As 3 d core-level spectra of As-rich GaAs(001)-2 × 4. (a) The clean surface and (b) the surface after exposure to 1 cycle of TMA and H2O purges.Back to article page