Figure 1From: Grain size dependence of dielectric relaxation in cerium oxide as high-k layerGrain sizes for as-deposited CeO 2 samples under different deposition temperatures (150° C, 200° C, 250° C, 300° C, and 350° C). XRD patterns are shown in the inset. Grain sizes (extracted from XRD data) increased following the increasing deposition temperatures.Back to article page