Figure 3From: Grain size dependence of dielectric relaxation in cerium oxide as high-k layerRaman spectrum of CeO 2 samples deposited under different temperatures (150° C, 200° C, 250° C, 300° C, and 350° C). Raman spectrum results are consistent with XRD data (inset of Figure 1): larger grain sizes were observed as the deposition temperature increases.Back to article page