Figure 1From: Metal silicide/poly-Si Schottky diodes for uncooled microbolometersTEM images demonstrate a Schottky diode film composed of three layers on Si 3 N 4 . (1) is the Si3N4 substrate film; the diode film consists of (2) poly-Si, (3) nickel silicide, and (4) Al contact layers. (a, b) Images of different samples with similar structures obtained by the use of different microscopes.Back to article page