Figure 1From: Structural and electrical characteristics of high-κ Er2O3 and Er2TiO5 gate dielectrics for a-IGZO thin-film transistorsXRD patterns of Er 2 O 3 and Er 2 TiO 5 dielectric films. Insets show AFM surface images of (a) Er2O3 and (b) Er2TiO5 films.Back to article page