TY - JOUR AU - Kuske, J. AU - Stephan, U. AU - Nowak, W. AU - Rohlecke, S. AU - Kottwitz, A. PY - 1997 DA - 1997// TI - Deposition conditions for large area PECVD of amorphous silicon JO - Mater Res Soc Symp Proc VL - 467 UR - https://doi.org/10.1557/PROC-467-591 DO - 10.1557/PROC-467-591 ID - Kuske1997 ER - TY - JOUR AU - Sansonnens, L. AU - Pletzer, A. AU - Magni, D. AU - Howling, A. A. AU - Hollenstein, C. AU - Schmitt, J. P. M. PY - 1997 DA - 1997// TI - A voltage uniformity study in large-area reactors for RF plasma deposition JO - Plasma Sources Sci Technol VL - 6 UR - https://doi.org/10.1088/0963-0252/6/2/010 DO - 10.1088/0963-0252/6/2/010 ID - Sansonnens1997 ER - TY - JOUR AU - Satake, K. AU - Yamakoshi, H. AU - Noda, M. PY - 2004 DA - 2004// TI - Experimental and numerical studies on voltage distribution in capacitively coupled very high-frequency plasmas JO - Plasma Sources Sci Technol VL - 13 UR - https://doi.org/10.1088/0963-0252/13/3/010 DO - 10.1088/0963-0252/13/3/010 ID - Satake2004 ER - TY - JOUR AU - Yamakoshi, H. AU - Satake, K. AU - Takeuchi, Y. AU - Mashima, H. AU - Aoi, T. PY - 2006 DA - 2006// TI - A technique for uniform generation of very-high-frequency plasma suited to large-area thin-film deposition JO - Appl Phys Lett VL - 88 UR - https://doi.org/10.1063/1.2176867 DO - 10.1063/1.2176867 ID - Yamakoshi2006 ER - TY - JOUR AU - Merche, D. AU - Vandencasteele, N. AU - Reniers, F. PY - 2012 DA - 2012// TI - Atmospheric plasmas for thin film deposition: a critical review JO - Thin Solid Films VL - 520 UR - https://doi.org/10.1016/j.tsf.2012.01.026 DO - 10.1016/j.tsf.2012.01.026 ID - Merche2012 ER - TY - BOOK AU - Christophoulos, C. PY - 1995 DA - 1995// TI - The Transmission-Line Modeling Method PB - Wiley-IEEE CY - Piscataway UR - https://doi.org/10.1109/9780470546659 DO - 10.1109/9780470546659 ID - Christophoulos1995 ER - TY - CHAP AU - Hiroaki, K. AU - Hiromasa, O. AU - Kiyoshi, Y. ED - Olivante, L. V. PY - 2008 DA - 2008// TI - High-rate and low-temperature film growth technology using stable glow plasma at atmospheric pressure BT - Materials Science Research Trends PB - Nova CY - New York ID - Hiroaki2008 ER - TY - BOOK AU - Chipman, R. A. PY - 1968 DA - 1968// TI - Theory and Problems of Transmission Lines PB - McGraw-Hill Inc. CY - Columbus ID - Chipman1968 ER -