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Table 1 Effective resistances and inductances of the Al electrode element[6]

From: Voltage distribution over capacitively coupled plasma electrode for atmospheric-pressure plasma generation

 

150 MHz

13.56 MHz

R (ohm/m)

0.843

0.253

L (H/m)

1.26 × 10−7

1.26 × 10−7

  1. The element width is 0.01 m.

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