Figure 8

Phases of Ni-silicide were identified by the analysis of atomic-resolution TEM images. (a) TEM image of a Ni-silicide/Si heterostructured nanowire with large diameter formed from sample A. The insert is the magnified image of the silicide part of nanowire, and the area corresponds to the square in (a). (b) Atomic resolution TEM image of the front of the silicide part, and the area corresponds to the square 1 in the insert of (a). (c) Atomic resolution TEM image of the interface of silicide and Si, and the area corresponds to the square 2 in the insert of (a). (d) TEM image of a Ni-silicide/Si heterostructured nanowire with small diameter formed from B-sample. The insert is the magnified image of the silicide part of nanowire, and the area corresponds to the square in (d). (e) Atomic resolution TEM image of the front of the silicide part, and the area corresponds to the square 1 in the insert of (d). (f) Atomic resolution TEM image of the interface of silicide and Si, and the area corresponds to the square 2 in the insert of (d).