Table 1 Repeatability results for concave spherical mirror
From: Profile measurement of concave spherical mirror and a flat mirror using a high-speed nanoprofiler
First | Second | Third | |
---|---|---|---|
Repeatability | PV 0.81 nm | PV 0.74 nm | PV 0.85 nm |
From: Profile measurement of concave spherical mirror and a flat mirror using a high-speed nanoprofiler
First | Second | Third | |
---|---|---|---|
Repeatability | PV 0.81 nm | PV 0.74 nm | PV 0.85 nm |