Table 2 Results of nanoprofiler and Fizeau interferometer for concave spherical mirror
From: Profile measurement of concave spherical mirror and a flat mirror using a high-speed nanoprofiler
Nanoprofiler | Fizeau interferometer | |
|---|---|---|
In three dimensions | PV 70.5 nm | PV 70.0 nm |
In two dimensions | PV 40.0 nm | PV 45.0 nm |
Measurement range | 20 × 20 mm | 30 × 30 mm |