Effect of focusing flow on stationary spot machining properties in elastic emission machining
© Takei and Mimura; licensee Springer. 2013
Received: 15 February 2013
Accepted: 18 April 2013
Published: 16 May 2013
Ultraprecise optical elements are applied in advanced optical apparatus. Elastic emission machining (EEM) is one of the ultraprecision machining methods used to fabricate shapes with 0.1-nm accuracy. In this study, we proposed and experimentally tested the control of the shape of a stationary spot profile by introducing a focusing-flow state between the nozzle outlet and the workpiece surface in EEM. The simulation results indicate that the focusing-flow nozzle sharpens the distribution of the velocity on the workpiece surface. The results of machining experiments verified those of the simulation. The obtained stationary spot conditions will be useful for surface processing with a high spatial resolution.
Optical devices operating in extremely short wavelength ranges require unprecedented accuracy because a small figure error and/or slight surface roughness distorts the wavefront of the reflected light. In the field of precision machining, the degree of accuracy has been increased to atomic order. Various types of mirror or lens having a peak-to-valley (p-v) accuracy of 1 nm can now be fabricated, which are applied to the advanced optical apparatus used in X-ray microscopy and extreme ultraviolet lithography (EUVL) . Ion beam figuring , magnetorheological finishing , and elastic emission machining (EEM)  are employed to process surfaces with atomic-order controllability. A surface profiler also plays a crucial role because figure correction is performed on the basis of measured data when the target accuracy is higher than 100 nm (p-v) .
In processing using profile data, the dwelling time of the spot profile is a parameter used to control the removal depth. The dwelling time distributions are converted to the scanning speed distributions of machining stages. The characteristics of the stationary spot such as the size, removal rate, and repeatability basically determine the performance of figure correction. The size of the spot and the removal rate are directly related to the spatial resolution and machining time, respectively, in figure correction. The high repeatability of the characteristics reduces the number of cycles between machining and measurements until the required accuracy is achieved.
EEM is one of the ultraprecision machining methods used to fabricate shapes with 0.1-nm accuracy without causing any crystallographic damage. A numerically controlled machining system has been developed for EEM . The relationship between the surface morphology of particles and the microroughness of EEM surfaces was investigated using perfectly spherical particles . The EEM surfaces were observed by scanning tunneling microscopy and confirmed to have atomic flatness . As a result, EEM has been widely applied to the fabrication of ultraprecise mirrors used in synchrotron radiation facilities and EUVL .
However, further improvement of the figure correction system is needed because larger optical devices with more complicated figures are now required. For example, ultraprecise X-ray mirrors with a length of 400 mm have become necessary . Ellipsoidal mirrors are also gaining increasing attention in the field of soft X-ray microscopy .
To improve the characteristics of stationary spot machining in EEM, we propose an improved method of flowing a fluid including particles. In particular, nozzle-type EEM utilizes a jet flow, which has been investigated in various fields such as water jet machining, water jet cleaning , and surface reforming with cavitation . In these studies, the shape of the aperture and the structure of the channel in the nozzle are optimized to form a variable flow from the nozzle. The method used to simulate the fluid flow has also been improved. The behavior of a jet flow can be predicted and effectively used to develop functional nozzles.
In this study, we propose a nozzle structure to further improve the properties of stationary spot machining in EEM. The structure can concentrate the fluid after it flows from the nozzle aperture. A fluid simulation is carried out to clarify the advantageousness of the proposed structure. Then, the nozzle is fabricated and tested to confirm the simulation results.
In nozzle-type EEM, to transport particles to the workpiece surface and remove them from the surface, a high-shear flow is required on the surface. The removal area and removal rate depend on the velocity distribution of the fluid in contact with the surface. The shape of the distribution can be controlled by changing the nozzle specifications such as the width, velocity, angle, and stand-off distance, where the stand-off distance is defined as the length between the nozzle outlet and the workpiece surface.
In this study, the generation of a focusing flow is applied to EEM. Figure 1b shows the concept of a focusing flow. The channel structure inside the nozzle causes the flow to converge at a certain distance from the aperture. At the point of convergence, the maximum flow velocity is high, even far from the aperture. Furthermore, compared with the standard nozzle shown in Figure 1a, the velocity distribution on the workpiece surface is narrow, which enables a small stationary spot profile with a high removal rate in the case of long stand-off distances.
Fluid simulation parameters
Model or values
Pure water at 20°C
1.006 × 10-3 Pa s
As the flow approaches the workpiece surface, it undergoes significant changes in its velocity direction as it rotates from perpendicular to nearly parallel to the wall. This leads to a flow with a high-shear rate on the workpiece surface even when the stand-off distance is 1 mm. The fluid pressure is increased on the surface where the two flows meet at the center. Then, the direction of the main stream changes toward the y-axis.
From the viewpoint of machining, the velocity near the surface is an important evaluation factor. Figure 2e,f shows the cross-sectional profiles of the velocity distributions for the two types of nozzle. The profile is Gaussian-like with a full width at half maximum of 0.5 mm when the focusing-flow nozzle is used. In contrast, there are two peaks in the velocity distribution profile for the straight-flow nozzle. The distance between the two peaks is approximately 1 mm, which is the same as the nozzle aperture width. In EEM, the shape of the stationary spot profile depends on the distributions of the numbers of particles supplied to and removed from the workpiece surface. Since the diameter of the particles is as large as 2 μm in this study, the particles move along a streamline. A comparison of the two profiles indicates that a minute stationary spot profile can be obtained using the focusing-flow nozzle because the removal depth is basically proportional to the velocity close to the workpiece surface.
Experimental parameters in EEM process
SiO2 2 μm φ
0.4, 0.6, 0.8, 1.0, 1.2, 1.4, 1.6, 1.8 mm
Results and discussion
When the focusing-flow nozzle is employed, the spot size decreases with increasing stand-off distance from 0.4 to 0.8 mm. The minimum spot size is 1.3 mm at a stand-off distance of 0.8 mm, and as the stand-off distance increases, the spot size gradually increases. The results indicate that the spot size and removal rate can be controlled by simply adjusting the stand-off distance without changing the nozzle. On the other hand, when the straight-flow nozzle is used, the spot remains of the same size regardless of the stand-off distance. When a change in machining conditions is necessary, a nozzle with a different size must be installed .
Finally, note that the stationary spot profiles in Figure 4a,b are in good agreement with the velocity distributions in Figure 2c,d, respectively. Thus, the shape of the stationary spot profiles can be predicted, which indicates that fluid simulators can be used for the further development of EEM nozzles suitable for figuring of various types of mirror.
In this study, we proposed and experimentally tested the control of the shape of a stationary spot profile by realizing a focusing-flow state between the nozzle outlet and the workpiece surface in EEM. The simulation results indicate that the focusing-flow nozzle sharpens the distribution of the velocity on the workpiece surface. The results of the machining experiments verified those of the simulation. The obtained stationary spot conditions will be useful for surface processing with a spatial resolution higher than 1.3 mm.
In this study, the shape of the channel affected the machining parameters. The basic idea of controlling the shape of stationary spot profiles through not only the nozzle aperture size but also the channel structure can be widely applied to various EEM optical fabrication processes, particularly for advanced optics with a complicated shape.
YT is a graduate student, and HM is an associate professor at the University of Tokyo in Japan.
This work was supported by SENTAN, JST.
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