Figure 4

Relation between InSb-originating phases (InSb, Sb, and In ₂ O ₃ ), annealing temperature, and InSb chip number. Black squares indicate single-phase In₂O₃; triangles indicate a phase mixture of InSb and In₂O₃; the red square indicates single-phase InSb; dots indicate a phase mixture of InSb and Sb, and circles indicate no relating peaks or amorphous. The dotted line indicates dominant phase change from Sb to In₂O₃.