Figure 4From: Nanopillar array with a λ/11 diameter fabricated by a kind of visible CW laser direct lithography systemSimulation result of coma effect. The simulated donut-shaped focal spot intensity vs coma effect on the xy plane: (a) A c = 0.5, (b) A c = 0.25 and (c) A c = 0.1. The corresponding intensity on the yz plane: (d) A c = 0.5, (e) A c = 0.25, and (f) A c = 0.1. Intensity along the y axis: (g) A c = 0.5, (h) A c = 0.25, and (i) A c = 0.1.Back to article page