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Table 1 Calculated values of ripple wavelength ( λ ), feature height ( h ), and base width of mounds/facets

From: Transition from ripples to faceted structures under low-energy argon ion bombardment of silicon: understanding the role of shadowing and sputtering

Angle of incidence

Fluence (ions cm-2)

λ(nm)

Average feature height (nm)

Average base width (nm)

70°

1 × 1017

34

2

-

2 × 1017

57

5

-

5 × 1017

-

16

131

10 × 1017

-

22

152

15 × 1017

-

30

199

20 × 1017

-

56

357

72.5°

1 × 1017

26

1

-

2 × 1017

27

2

-

5 × 1017

-

28

237

10 × 1017

-

50

363

15 × 1017

-

78

486

 

20 × 1017

-

90

525

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