Table 1 Calculated values of ripple wavelength ( λ ), feature height ( h ), and base width of mounds/facets
Angle of incidence | Fluence (ions cm-2) | λ(nm) | Average feature height (nm) | Average base width (nm) |
---|---|---|---|---|
70° | 1 × 1017 | 34 | 2 | - |
2 × 1017 | 57 | 5 | - | |
5 × 1017 | - | 16 | 131 | |
10 × 1017 | - | 22 | 152 | |
15 × 1017 | - | 30 | 199 | |
20 × 1017 | - | 56 | 357 | |
72.5° | 1 × 1017 | 26 | 1 | - |
2 × 1017 | 27 | 2 | - | |
5 × 1017 | - | 28 | 237 | |
10 × 1017 | - | 50 | 363 | |
15 × 1017 | - | 78 | 486 | |
20 × 1017 | - | 90 | 525 |