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Table 1 Calculated values of ripple wavelength ( λ ), feature height ( h ), and base width of mounds/facets

From: Transition from ripples to faceted structures under low-energy argon ion bombardment of silicon: understanding the role of shadowing and sputtering

Angle of incidence Fluence (ions cm-2) λ(nm) Average feature height (nm) Average base width (nm)
70° 1 × 1017 34 2 -
2 × 1017 57 5 -
5 × 1017 - 16 131
10 × 1017 - 22 152
15 × 1017 - 30 199
20 × 1017 - 56 357
72.5° 1 × 1017 26 1 -
2 × 1017 27 2 -
5 × 1017 - 28 237
10 × 1017 - 50 363
15 × 1017 - 78 486
  20 × 1017 - 90 525