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Table 1 Hardness and Young's modulus of BFO thin films obtained from various deposition methods

From: Structural and nanomechanical properties of BiFeO3 thin films deposited by radio frequency magnetron sputtering

 

H(GPa)

E(GPa)

Radio frequency magnetron sputtering-derived BFOa

  

  350°C

6.8

131.4

  400°C

8.5

147.6

  450°C

10.6

170.8

Sol–gel-derived BFO [26]

2.8~3.8

26~51

  1. aThe present work.
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