Figure 5From: Structural and optical characterization of pure Si-rich nitride thin filmsEvolution of the FTIR spectra of SiN x with the refractive index. The FTIR spectra of the layers deposited by the N2-reactive (black) and the co-sputtering (gray) methods were measured with a normal incidence (a) and with an incidence angle of 65° (b).Back to article page