Figure 4From: Uniform SiGe/Si quantum well nanorod and nanodot arrays fabricated using nanosphere lithographyPL spectra measured at 10 K of the as-grown and etched samples. (a) PL spectra in the wavelength range from 1.0 to 2.0 μm of the as-grown and etched SiGe/Si MQW samples with different etching times. (b) PL spectra in the wavelength range from 1.2 to 1.6 μm are amplified.Back to article page