Figure 6From: Uniform SiGe/Si quantum well nanorod and nanodot arrays fabricated using nanosphere lithographyOptical reflection spectra with wavelengths from 0.3 to 2 μm for the as-grown and etched samples. The spectra were measured at an incident angle of 5°. The inset also shows the variation in reflectance at 1.55 μm as a function of etching times.Back to article page