Table 1 Conditions of deformed layers on unloading
Crystallographic orientation | |||
|---|---|---|---|
(010) | (101) | (111) | |
Maximum depth of deformed layers (nm) | 9.1 | 9.0 | 5.8 |
Recovery of the center (nm) | 3.7 | 3.0 | 2.8 |
Description of deformed layers | Thin at the center and thick at the circumference | Thick at the center and thin at circumference | Relatively uniform thickness |