Table 1 APT compositions of the Er-doped SRSO layer in the as-deposited and 1,100°C 1-h annealed state
From: Nanoscale evidence of erbium clustering in Er-doped silicon-rich silica
As-deposited | Annealed at 1,100°C | |
|---|---|---|
Si (at.%) | 35.1 ± 0.4 | 35.0 ± 0.4 |
O (at.%) | 63.2 ± 0.4 | 63.1 ± 0.4 |
Er (at.%) | 1.7 ± 0.4 | 1.9 ± 0.4 |
Er (at·cm−3) | 1.1 × 1021 | 1.3 × 1021 |
Si excess (at.%) | Approximately 3.6 % | Approximately 3.5% |