Figure 5From: Ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shellsSEM images of the fractured and cracked Si nanopillars. (a) Formed from the highly doped Si after etching in λ1 solution for 10 min, (b) from the lightly doped Si after etching in λ2 solution for 10 min, and (c) from the lightly doped Si after etching in λ1 solution for 10 min.Back to article page