Figure 6From: Ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shellsSEM images of the cross-sectioned nanopillars. (a) Nanoporous Si nanopillars formed from the highly doped Si, and (b) Si nanopillars with solid core and nanoporous shell formed from the lightly doped Si after etching in λ3 solution for 10 min.Back to article page