Figure 2
From: New understanding of hardening mechanism of TiN/SiN x -based nanocomposite films
Cross-sectional HRTEM images of TiN/SiN x and TiAlN/SiN x nanocomposite films. (a) Low magnification, (b) medium magnification, (d) high magnification for TiN/SiN x nanocomposite film (Si/Ti = 4:21), and (c) low magnification, (e) high magnification for TiAlN/SiN x nanocomposite film (Si/Ti0.7Al0.3 = 3:22). The SiN x interfacial phase is observed to exist as crystallized state, rather than amorphous state, such as E zone between A and C crystals, F zone between A and B crystals, H zone between B and D crystals, and G zone between C and D crystals.