Figure 5From: New understanding of hardening mechanism of TiN/SiN x -based nanocomposite filmsCross-sectional schematic diagrams. (a) Nanoscale configuration (nc- TiN/ c- SiN x model) and (b) columnar crystals within TiN/SiN x nanocomposite film (the red frame and the dash line show that (a) is the microstructural model of the local zone within (b)).Back to article page