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Figure 3 | Nanoscale Research Letters

Figure 3

From: Charge transport mechanisms and memory effects in amorphous TaN x thin films

Figure 3

FIB and TEM images of the TaN x film deposited on Si. (a) Cross section of the TaN x film deposited on Si obtained with FIB technique. (b) TEM image of amorphous and chain-like structures. (c) HRTEM image of 5-nm nanoparticles forming the chain-like structure. (d) Selected-area electron diffraction (SAED) pattern, where beside the diffused broad band characteristic for amorphous material, faint spots are present which could be indexed as cubic Fm-3m tantalum.

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