Figure 1

XPS analysis of P-doped Si-NCs/SiN _x films. (a) Si and P concentrations in P-doped Si-NCs/SiN _x films as a function of the R_c value. (b) Deconvolution analysis of a representative Si 2p XPS spectrum of the P-doped Si-NCs/SiN _x sample with R_c = 0.79. (c) XPS peak intensity ratios of I_Si-Si/(I_Si-Si + I_Si-N) and I_P-P/(I_Si-P + I_P-P) of P-doped Si-NCs/SiN _x films as a function of the R_c value. (d) Deconvolution analysis of a representative P 2p XPS spectrum of the P-doped Si-NCs/SiN _x sample with R_c = 0.79.