Figure 3From: Large-scale fabrication of nanopatterned sapphire substrates by annealing of patterned Al thin films by soft UV-nanoimprint lithographySEM images of the morphology of PDMS soft mold molding. From the quartz master (a), patterned AMONIL-MMS4 (b), and patterned Al thin films obtained by the UV-NIL and RIE (c).Back to article page