Figure 5
XPS spectra in (a) C1s and (b) O1s regions. XPS spectra were obtained from a bare SU-8 structure before pyrolysis and a pyrolyzed bulk carbon structure.
Figure 5 | Nanoscale Research Letters
XPS spectra in (a) C1s and (b) O1s regions. XPS spectra were obtained from a bare SU-8 structure before pyrolysis and a pyrolyzed bulk carbon structure.