Figure 2

Illustration of the integration process of micropore. (1) Si₃N₄film on one side of the Si chip was obtained by LPCVD method. (2) A window on the top of chip at Si side was fabricated by wet etching. (3) Artificial micropores on the Si₃N₄film were fabricated by FIB. (4) PC membrane was covered on the Si₃N₄pore and sealed using PDMS. The inset in the top right corner is the SEM image of Si₃N₄ micropore; the inset in the lower right corner is an AFM image of the PC nanopore arrays.