Figure 3From: Detecting a single molecule using a micropore-nanopore hybrid chipSEM images of the Si 3 N 4 micropores with different diameters in Si-Si 3 N 4 hybrid structures. (a) 0.47 μm, (b) 0.88 μm, (c) 1.5 μm and (d) 2.0 μm.Back to article page