Account

Table 1 RMS surface roughness ( R _q ) of self-assembled Au droplets at corresponding annealing temperature

From: Annealing temperature effect on self-assembled Au droplets on Si (111)

	Temperature (°C)
	Pre-anneal	50	100	350	550	700	800	850
R_q (nm)	0.376	0.872	3.701	3.898	4.024	4.158	6.856	3.912

R_q is gradually increased at 800°C and dropped at 850°C with droplet melting potentially due to the lower eutectic melting point.

Back to article page