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Table 1 RMS surface roughness ( R q ) of self-assembled Au droplets at corresponding annealing temperature

From: Annealing temperature effect on self-assembled Au droplets on Si (111)

  Temperature (°C)
Pre-anneal 50 100 350 550 700 800 850
Rq (nm) 0.376 0.872 3.701 3.898 4.024 4.158 6.856 3.912
  1. Rq is gradually increased at 800°C and dropped at 850°C with droplet melting potentially due to the lower eutectic melting point.