Figure 5From: Effects of post-deposition annealing ambient on band alignment of RF magnetron-sputtered Y2O3 film on gallium nitrideSchematic diagram showing the energy band alignment of the Y 2 O 3 /IL/GaN system. Energy band alignment of the Y2O3/IL/GaN system for the sample annealed in (a) oxygen, (b) argon and forming gas, and (c) nitrogen ambient.Back to article page