Table 1 Typical values of parameters under vacuum conditions in KPFM simulation
Parameter | Unit | Value |
---|---|---|
A | nm | 5 |
k 1 | N/m | 40 |
k 2 | N/m | 1,600 |
f 1 | kHz | 300 |
f 2 | kHz | 300 × 6.3 |
Q | 30,000 | |
z0t | nm | 6 |
δzot | nm | 0.1 |
R | nm | 5 |
S | μm | 38 × 225 |
h | μm | 14 |
f m | kHz | 1 |
V ac | V | 1 |
B | Hz | 200 |
n ds | fm/√Hz | 100 |