Table 1 Ag ion implantation parameters for all samples
Sample | Fluence of ion implantation (ions/cm2) | Energy of ion implantation (kV) |
|---|---|---|
S1 | 5 × 1016 | 20 |
S2 | 5 × 1016 | 40 |
S3 | 1 × 1017 | 40 |
S4 | 5 × 1016 | 60 |
Sample | Fluence of ion implantation (ions/cm2) | Energy of ion implantation (kV) |
|---|---|---|
S1 | 5 × 1016 | 20 |
S2 | 5 × 1016 | 40 |
S3 | 1 × 1017 | 40 |
S4 | 5 × 1016 | 60 |