Figure 5From: Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithographyRaman spectra of patterned regions. (a, b) Two different spectral zones of the same sample patterned with a thicker carbonaceous layer (approximately 50 nm) while (c) spectra, bearing a lower signal, has been collected on a 2-nm-thick layer. All spectra have been fitted with a linear combination of Gaussian and Lorentzian curves (c, f) to extrapolate the peak centers. (d) The G positions and the I(G)/I(D) values fall within the theoretical first stage of the amorphization trajectory. (e) Interdefect distance La is deducted from Tuinstra-Koenig relation, valid for thin surface layers of a graphite sample. For details, see the main text. (f) A proposed fit that indicates the components of the band around 1,600 cm−1.Back to article page