Figure 3From: Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer depositionFESEM images. (a) Uncoated PET film and aluminum oxide-coated PET film by (b) ALD, (c) ALD with plasma pretreatment, and (e) PA-ALD. (d) and (f) are the magnified images of (c) and (e).Back to article page