Figure 8From: Atomic layer deposition of high-density Pt nanodots on Al2O3 film using (MeCp)Pt(Me)3 and O2 precursors for nonvolatile memory applicationsHigh-frequency (1 MHz) C - V hysteresis curves of the MOS capacitors. (a) Without Pt nanodots and (b) with Pt nanodots.Back to article page