Growth of nanolaminate structure of tetragonal zirconia by pulsed laser deposition
© Balakrishnan et al.; licensee Springer. 2013
Received: 9 July 2012
Accepted: 4 January 2013
Published: 15 February 2013
Alumina/zirconia (Al2O3/ZrO2) multilayer thin films were deposited on Si (100) substrates at an optimized oxygen partial pressure of 3 Pa at room temperature by pulsed laser deposition. The Al2O3/ZrO2 multilayers of 10:10, 5:10, 5:5, and 4:4 nm with 40 bilayers were deposited alternately in order to stabilize a high-temperature phase of zirconia at room temperature. All these films were characterized by X-ray diffraction (XRD), cross-sectional transmission electron microscopy (XTEM), and atomic force microscopy. The XRD studies of all the multilayer films showed only a tetragonal structure of zirconia and amorphous alumina. The high-temperature XRD studies of a typical 5:5-nm film indicated the formation of tetragonal zirconia at room temperature and high thermal stability. It was found that the critical layer thickness of zirconia is ≤10 nm, below which tetragonal zirconia is formed at room temperature. The XTEM studies on the as-deposited (Al2O3/ZrO2) 5:10-nm multilayer film showed distinct formation of multilayers with sharp interface and consists of mainly tetragonal phase and amorphous alumina, whereas the annealed film (5:10 nm) showed the inter-diffusion of layers at the interface.
Zirconium oxide (ZrO2) has high refractive index, high melting point, high resistance to oxidation, good tribological properties, oxygen ion conductivity, low thermal conductivity, and high coefficient of thermal expansion. ZrO2 coatings are widely used in several technological applications such as heat-resistant layers, optical coatings, buffer layers for growing superconductors, oxygen sensors, ion conductors, high-k dielectrics, and thermal barrier coatings[1, 2]. Zirconia (ZrO2) crystallizes in different polymorphs such as monoclinic (m), tetragonal (t), and cubic (c) at different temperatures in atmospheric pressure. For many high-temperature applications, zirconia is stabilized in its tetragonal structure at room temperature, thus avoiding phase transformation from tetragonal to monoclinic structure at about 1,233 to 1,453 K. One of the mechanisms to retain the tetragonal phase of zirconia (t-ZrO2) is doping with other oxides or controlling the crystallite size of the high-temperature phase (tetragonal and cubic) within a few nanometers. The surface energy of the tetragonal phase is lower than that of the monoclinic phase for similar crystallite size, and hence, the reduction of crystallite size to a few nanometers could result in stabilizing the tetragonal phase at room temperature[2–4]. Formation of Al2O3/ZrO2 nanolaminate structure is an important method to stabilize the high-temperature zirconia phase at room temperature. Al2O3/ZrO2 multilayer films have been used as bond layers of thermal barrier Coatings, dielectric films, and highly transparent materials in optical and protective coatings[2, 3]. Nanolaminates and nanocomposites of ZrO2 represent a wide spectrum of useful properties. The Al2O3/ZrO2 nanolaminate actively protects medical implant-grade 316L stainless steel against perforated pitting[5, 6]. The Al2O3/ZrO2 nanolaminate structure provides pinhole-free films, which are suitable for encapsulation layers for large-area organic devices. The Al2O3/ZrO2 ceramic oxide multilayers have high-temperature stability, chemical inertness, and improved mechanical properties, and hence, they find applications in components and equipment where the friction coefficient plays a major role.
Zirconia exhibits enhanced ductility with reference to alumina. Admixing zirconia with alumina is believed to result in improved elasto-mechanical properties to strengthen and toughen the material. Drastic increase in strength and fracture toughness has been achieved in Al2O3/ZrO2 layer composites. The toughening effect is most often explained in terms of an alumina matrix, which exerts local compressive stresses around ZrO2 and hinders the phase transformation from tetragonal to monoclinic phase[10–12]. The major failure mechanism in thermal barrier coatings (TBCs) is the formation of a thermally grown oxide (TGO) layer at the bond coat/zirconia interface. The introduction of single-layer alumina or graded alumina/zirconia interlayer offers a potential solution to this problem by incorporating an oxygen diffusion barrier into the TBC system, thereby reducing the TGO growth rate. By controlling the oxide/TBC interface formation, better adhesion and minimum thermal stresses could be achieved.
Pulsed laser deposition (PLD) is quite easy to produce multilayer films composed of two or more materials. One of the major advantages is that the stoichiometry of the target can be retained in the deposited films. This is due to the high rate of ablation, which causes all the elements to evaporate at the same time[15, 16]. The present work has focused on the development of Al2O3/ZrO2 nanolaminate thin films in order to stabilize the tetragonal phase of zirconia at room temperature as a function of ZrO2 layer thickness.
Al2O3 (99.99% purity) and ZrO2 (99.99%) pellets of approximately 25 mm in diameter and approximately 3 mm in thickness were prepared and sintered at 1,673 K for 6 h and used as targets for PLD. The deposition was performed using KrF excimer laser (λ = 248 nm), and other deposition parameters were reported elsewhere[17, 18]. Si (100)-oriented substrates of dimension 10 mm × 10 mm × 0.5 mm (n-type phosphorous doped with a resistivity of 20 to 30 Ω cm) were used for the deposition of films. Multilayers, which consist of Al2O3 and ZrO2, of 10:10, 5:10, 5:5, and 4:4 nm with 40 bilayers were deposited at an optimized oxygen partial pressure of 3 Pa at room temperature. Before the deposition of the multilayers, deposition rates of the individual layers were determined accurately by measuring the thickness of each layer using a Dektak profilometer (Dektak 6M Stylus Profiler, Veeco, Plainview, NY, USA). All the multilayer samples were analyzed by conventional X-ray diffraction (XRD; INEL XRG–3000 Diffractometer, Artenay, France). High-temperature XRD (HTXRD; INEL XRG–3000 Diffractometer attached with a curved position-sensitive detector and Bühler 2.4 HDK high-temperature camera, Hechingen, Germany) was performed to study the structural changes in the 5:5-nm film as a function of temperature in the range 298-1,273 K. A Pt-Re thermocouple was used for measuring the temperature of the sample. A heating rate of 10 K/min, cooling rate of 25 K/min, and soaking time of 5 min were used. The patterns were recorded in steps of 100 K, in vacuum of the order of approximately 2 × 10−3 Pa for 30 min. For the cross-sectional transmission electron microscopy (XTEM) analysis, the specimen (10 mm × 10 mm × 0.5 mm) was cut into small rectangular pieces using a wire saw. Two of these were glued, making the film surface face-to-face with a special adhesive and cured at 130°C for 1 h. The sample was then crimped into a titanium slot grid, and the assembly was mechanically ground using a tripod polisher. It was further ion-milled to electron transparency in a TechNoorg Linda IV4 ion miller (Budapest, Hungary). High-resolution transmission electron microscopy (HRTEM) studies of XTEM specimens were carried out in a JEOL 2000 EX II (T) transmission electron microscope (Akishima-shi, Japan) operated at 200 kV. Surface morphology of the samples was examined using an atomic force microscope (AFM; Nanoscope E Digital instruments Inc, Model: NSE, Santa Barbara, CA, USA) in contact mode using Si3N4 cantilever.
Results and discussion
XRD and HTXRD studies
Alumina influences the growth of the zirconia layer and provides a template for the stabilization of the metastable phase of zirconia. The layer thickness is the most important influencing parameter on the stabilization of tetragonal zirconia. The critical thickness of the metastable phase depends on a combination of bulk free energy, interfacial energy, and surface energy. When the layers are very thin, the interfacial and surface energies dominate both bulk and strain energy terms, which could promote the formation of a metastable phase with a low interfacial energy. This study demonstrates the feasibility of stabilizing the metastable zirconia phase by the suitable selection of thickness of zirconia layer using the template layer of 5- and 10-nm-thick alumina. In these Al2O3/ZrO2 nanolaminates, Al2O3 has negligible solubility in zirconia; however, it forms a rigid matrix around the ZrO2 crystals which causes a local compressive stress and hinders the phase transformation. Also, Al2O3 has almost twice the elastic constant (approximately 390 GPa) compared to that of ZrO2 (approximately 207 GPa). This high elastic constant provides structural stability for the tetragonal phase of zirconia. If the ZrO2 layer thickness is ≤10 nm, it is possible to stabilize the tetragonal phase at room temperature. If the ZrO2 layer thickness is exceeding 10 nm, the Al2O3 layer is not able to provide enough local compressive stress to suppress the monoclinic phase. This critical layer thickness depends on the deposition method and parameters used in the deposition. In the present work, all the films showed the t-ZrO2 and there was no phase transformation. PLD is also a non-equilibrium process, and thermodynamic considerations may strongly influence both phase formation within layers and at interfaces.
HRTEM and AFM analyses
Garvie observed that t-ZrO2 is present at room temperature, when the particle size of the tetragonal phase is smaller than 30 nm (critical size). Aita et al. reported a critical layer thickness of 6.2 nm at 564 K for nanolaminates made from polycrystalline zirconia and amorphous alumina. Teixeira et al. deposited Al2O3/ZrO2 nanolayers by DC reactive magnetron sputtering and reported that the tetragonal phase content increased as the ZrO2 layer thickness decreased. Aita[4, 24] combined ZrO2 with other metal oxides in multilayer nanolaminate films and found that as the thickness of individual layers decreased, interfaces play an important role in determining the nanolaminates' overall properties. Barshilia et al. prepared a nanolayer of Al2O3/ZrO2 and demonstrated that a critical ZrO2 layer thickness ≤10.5 nm at a substrate temperature of 973 K was required in order to stabilize the t-ZrO2 phase.
It was observed that the crystallite sizes are of the range 4 to 8 nm (5:5-nm multilayer film) in the temperature range of 300 to 1,273 K. Tetragonal ZrO2 have lower free energy compared to monoclinic ZrO2 for the same crystallite sizes, which means that the t-ZrO2 can be stabilized if the crystallite size is less than a certain critical value. The critical size of 30 nm for bulk[28, 30], 50 nm for evaporated ZrO2 films, and 16.5 nm for CVD were reported. In the present work, multilayer films were prepared by PLD, and it was found that the critical layer thickness of ZrO2 is ≤10 nm. There are evidences[4, 21] that the tetragonal zirconia nanocrystallites in zirconia-alumina nanolaminates are less likely to undergo transformation than the dopant-stabilized zirconia microcrystallites in zirconia-alumina composites.
The Al2O3/ZrO2 multilayers of 10:10-, 5:10-, 5:5-, and 4:4-nm films were deposited on Si (100) substrates by PLD. The XRD and HTXRD studies showed the formation of tetragonal phase of ZrO2 at room temperature when the ZrO2 layer thickness is ≤10 nm. The XTEM investigation of the as-deposited 5:10-nm film showed the distinct formation of nanolaminates. The ZrO2 layer shows lattice fringes and consists of mainly tetragonal phase with no secondary phases at the interfaces and amorphous alumina. The XTEM of the 5:10-nm annealed film showed the inter-diffusion of layers at the interface and amorphization. The AFM studies showed the dense formation of grains in the as-deposited films and cluster formation in the annealed films. Therefore, the existence of tetragonal zirconia at temperatures well below the normal transformation temperature can be explained by the critical layer thickness and critical crystallite size effect.
The authors thank Dr. S. Murugesan for the HTXRD examination; Shri. C. Ghosh and Dr. R. Divakar for the TEM analysis; Dr. M. Vijayalakshmi, Associate Director of the Physical Metallurgy Group, Dr. T. Jayakumar, Director of the Metallurgy and Materials Group, Shri E. Mohandas, Head of MSSCD, and S.C. Chetal, Director of IGCAR, Kalpakkam, for the constant support and encouragement. The authors (Dr. G. Balakrishnan and Prof. Jung Il Song) are also thankful to the National Research Foundation of Korea (NRF) for the grant funded by the Korea Government (MEST; nos. 2012–0009455 and 2011–0002804) and the Brain Korea (BK 21) Project corps of the second phase.
- Balakrishnan G, Sairam TN, Kuppusami P, Thiumurugesan R, Mohandas E, Ganesan V, Sastikumar D: Influence of oxygen partial pressure on the properties of pulsed laser deposited nanocrystalline zirconia thin films. Appl Surf Sci 2011, 257: 8506–8510. 10.1016/j.apsusc.2011.05.003View ArticleGoogle Scholar
- Gao P, Meng LJ, Dos Santos MP, Teixeira V, Andritschky M: Study of ZrO2/Al2O3 multilayers. Vacuum 2002, 64: 267–273. 10.1016/S0042-207X(01)00311-6View ArticleGoogle Scholar
- Teixeira V, Monteiro J, Duarte J, Portinha A: Deposition of composite and nanolaminate ceramic coatings by sputtering. Vacuum 2002, 67: 477–483. 10.1016/S0042-207X(02)00235-XView ArticleGoogle Scholar
- Aita CR: Zirconia-metal (Al, Y, Ti) oxide nanolaminate films. Surf Coat Technol 2004, 188–189: 179–185.View ArticleGoogle Scholar
- Bull SJ, Jones AM: Multilayer coatings for improved performance. Surf Coat Technol 1996, 78: 173–184. 10.1016/0257-8972(94)02407-3View ArticleGoogle Scholar
- Gaertner WF, Hoppe EE, Omari MA, Sorbello RS, Aita CR: Zirconia-alumina nanolaminate for perforated pitting corrosion protection of stainless steel. J Vac Sci Technol A 2004, 22: 272–280. 10.1116/1.1642650View ArticleGoogle Scholar
- Meyer BJ, Görrn P, Bertram F, Hamwi S, Winkler T, Johannes H-H, Weimann T, Hinze P, Riedl T, Kowalsky W: Al2O3/ZrO2 nanolaminates as ultrahigh gas-diffusion barriers - a strategy for reliable encapsulation of organic electronics. Adv Mater 2009, 21: 1845–1849. 10.1002/adma.200803440View ArticleGoogle Scholar
- Portinha A, Teixeira V, Carneiro TJO, Dub SN, Shmegera R, Tavares CJ: Hard ZrO2/Al2O3 nanolaminated PVD coatings evaluated by nanoindentation. Surf Coat Technol 2005, 200: 765–768. 10.1016/j.surfcoat.2005.02.021View ArticleGoogle Scholar
- Dakskobler A, Kosmac T: The preparation and properties of Al2O3/ZrO2 composites with corrugated microstructures. J Eur Ceram Soc 2004, 24: 3351–3357. 10.1016/j.jeurceramsoc.2003.10.026View ArticleGoogle Scholar
- Aita CR, Scanlan CM, Gajdardziska-Josifovska M: Sputter deposited zirconia-alumina nanolaminate coatings. J Mater Sci 1994, 46: 40–42.Google Scholar
- Lange FF: Transformation toughening. J Mater Sci 1982, 17: 225–234. 10.1007/BF00809057View ArticleGoogle Scholar
- Garvie RC, Pascoe RT, Hannink RHJ: Ceramic steel. Nature 1975, 258: 703–705. 10.1038/258703a0View ArticleGoogle Scholar
- Leushake U, Krell T, Schulz U, Peters M, Kaysser WA, Rabin BH: Microstructure and phase stability of EB-PVD alumina and alumina/zirconia for thermal barrier coating applications. Surf Coat Technol 1997, 94–95: 131–136.View ArticleGoogle Scholar
- Tamura M, Takahashi M, Ishii J, Suzuki K, Sato M, Shimomura K: Multilayered thermal barrier coating for land-based gas turbines. J Therm Spray Technol 1999, 8: 68–72. 10.1361/105996399770350584View ArticleGoogle Scholar
- Chrisey DB, Hubler GB (Eds): Pulsed Laser Deposition of Thin Films. New York: Wiley; 1994.Google Scholar
- Eason R: Pulsed Laser Deposition of Thin Films. Hoboken: Wiley; 2006.View ArticleGoogle Scholar
- Balakrishnan G, Kuppusami P, Tripura Sundari S, Thirumurugesan R, Ganesan V, Mohandas E, Sastikumar D: Structural and optical properties of γ-alumina thin films prepared by pulsed laser deposition. Thin Solid Films 2010, 518: 3898–3902. 10.1016/j.tsf.2009.12.001View ArticleGoogle Scholar
- Balakrishnan G, Kuppusami P, Murugesan S, Ghosh C, Divakar R, Mohandas E, Sastikumar D: Characterization of Al2O3/ZrO2 nano multilayer thin films prepared by pulsed laser deposition. Mater Chem Phys 2012, 133: 299–303. 10.1016/j.matchemphys.2012.01.027View ArticleGoogle Scholar
- Aita CR, Hoppe EE, Sorbello RS: Fundamental optical absorption edge of undoped tetragonal zirconium dioxide. Appl Phys Lett 2003, 82: 677–679. 10.1063/1.1543234View ArticleGoogle Scholar
- Scanlan CM, Gajdardziska-Josifovska M, Aita CR: Tetragonal zirconia growth by nanolaminates formation. Appl Phys Lett 1994, 64: 3548–3550. 10.1063/1.111220View ArticleGoogle Scholar
- Zhao C, Roebben G, Bender H, Young E, Haukka S, Houssa M, Naili M, De Gendt S, Heyns M, Van Der Biest O: In situ crystallisation in ZrO2 thin films during high temperature X-ray diffraction. Microelectronics Reliability 2001, 41: 995–998. 10.1016/S0026-2714(01)00055-5View ArticleGoogle Scholar
- Clemens BM, Kung H, Barnett SA: Structure and strength of multilayers. MRS Bulletin 1999, 24: 20–26.Google Scholar
- Andritschky M, Cunha I, Alpuim P: Thermal stability of zirconia/alumina thin coatings produced by magnetron sputtering. Surf Coat Technol 1997, 94–95: 144–148.View ArticleGoogle Scholar
- Aita CR: Reactive sputter deposition of metal oxide nanolaminates. J Phys Condens Matter 2008, 20: 264006. 10.1088/0953-8984/20/26/264006View ArticleGoogle Scholar
- Barshilia HC, Deepthi B, Rajam KS: Stabilization of tetragonal and cubic phases of ZrO2 in pulsed sputter deposited Al2O3/ZrO2 and ZrO2/Y2O3 nanolayered thin films. J Appl Phys 2008, 104: 113532. 10.1063/1.3040720View ArticleGoogle Scholar
- Schofield MA, Aita CR, Rice PM, Gajdardziska-Josifovska M: Transmission electron microscopy study of zirconia–alumina nanolaminates grown by reactive sputter deposition. Part I: zirconia nanocrystallite growth morphology. Thin Solid Films 1998, 326: 106–116. 10.1016/S0040-6090(98)00542-2View ArticleGoogle Scholar
- Schofield MA, Aita CR, Rice PM, Gajdardziska-Josifovska M: Transmission electron microscopy study of zirconia–alumina nanolaminates grown by reactive sputter deposition. Part II: zirconia nanocrystallite growth morphology. Thin Solid Films 1998, 326: 117–125. 10.1016/S0040-6090(98)00519-7View ArticleGoogle Scholar
- Garvie RC: Stabilization of the tetragonal structure in zirconia microcrystals. J Phys Chem 1978, 82: 218–224. 10.1021/j100491a016View ArticleGoogle Scholar
- Aita CR, Wiggins MD, Whig R, Scanlan CM, Josifovska MG: Thermodynamics of tetragonal zirconia formation in a nanolaminate film. J Appl Phys 1996, 79(2):1176–1178. 10.1063/1.360902View ArticleGoogle Scholar
- Garvie RC: The occurrence of metastable tetragonal zirconia as a crystallite size effect. J Phys Chem 1965, 69: 1238–1243. 10.1021/j100888a024View ArticleGoogle Scholar
- El-Shanahoury IA, Rudenko VA, Ibbrahim IA: Polymorphic behavior of thin evaporated films of zirconium and hafnium oxides. J Am Ceram Soc 1970, 53: 264–268. 10.1111/j.1151-2916.1970.tb12090.xView ArticleGoogle Scholar
- Kim JS, Marzouk HA, Reucroft PJ: Deposition and structural characterization of ZrO2 and yttria-stabilized ZrO2 films by chemical vapor deposition. Thin Solid Films 1995, 254: 33–38. 10.1016/0040-6090(94)06274-OView ArticleGoogle Scholar
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