Figure 2
From: On the formation of blisters in annealed hydrogenated a-Si layers
Results of deconvolution of IR spectra. Deconvolution of the IR stretching vibration peak into two sub-peaks at 1,996 and 2,092 cm−1 in the sample hydrogenated at 1.5 ml/min and annealed at 350°C for 1 h. Similar behaviour is also exhibited by the sample annealed for 4 h. The close square curve is the experimental peak, triangle and dot curves are the two deconvoluted peaks, whereas the open square curve is the fitting to the experimental curve.