Figure 5From: On the formation of blisters in annealed hydrogenated a-Si layersAFM images of surface blisters. (a) Sample hydrogenated at 1.5 ml/min and annealed for 1 h (scan size 40 μm) and (b) sample hydrogenated at 0.4 ml/min and annealed for 4 h (scan size 10 μm).Back to article page