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Table 1 Comparison between ERDA and IR H concentration in a sample hydrogenated at 1.5 ml/min

From: On the formation of blisters in annealed hydrogenated a-Si layers

Annealing time (h) H (at.%)
  ERDA IR IR
   (A = 1.4 × 1020) [[23, 24]] (A = 9.1 × 1019) [[1]]
   0 17.5 20.4 13.3
   1 10.9 14.9 9.55
   4 9.9 12.8 8.20
  1. Comparison between ERDA and IR hydrogen concentration in a-Si single layers hydrogenated at 1.5 ml/min as a function of annealing time at 350°C. IR concentrations are calculated with two different A values (cm−2). See text.