From: On the formation of blisters in annealed hydrogenated a-Si layers
Annealing time (h)
H (at.%)
ERDA
IR
(A = 1.4 × 1020) [[23, 24]]
(A = 9.1 × 1019) [[1]]
0
17.5
20.4
13.3
1
10.9
14.9
9.55
4
9.9
12.8
8.20