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Table 1 Comparison between ERDA and IR H concentration in a sample hydrogenated at 1.5 ml/min

From: On the formation of blisters in annealed hydrogenated a-Si layers

Annealing time (h)

H (at.%)

 

ERDA

IR

IR

  

(A = 1.4 × 1020) [[23, 24]]

(A = 9.1 × 1019) [[1]]

   0

17.5

20.4

13.3

   1

10.9

14.9

9.55

   4

9.9

12.8

8.20

  1. Comparison between ERDA and IR hydrogen concentration in a-Si single layers hydrogenated at 1.5 ml/min as a function of annealing time at 350°C. IR concentrations are calculated with two different A values (cm−2). See text.

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