Table 1 Results of EBSD analysis of bulk Si and PS surfaces covered with Cu
From: Comparative study of initial stages of copper immersion deposition on bulk and porous silicon
Sample type | Phase | Percentage (%) | Count | Area (mm2) | Orientation | Lattice cell |
|---|---|---|---|---|---|---|
Cu/Si (100) | Not detected | 15.9 | 437 | 0.03 | None | Unsolved points |
Silicon | 42.9 | 1,182 | 0.07 | (100) | Face-centered cubic system | |
Copper | 28.2 | 778 | 0.05 | (100) | Face-centered cubic system | |
Cu2O | 13.0 | 357 | 0.02 | (100) | Primitive cubic system | |
Cu/PS/Si (100) | Not detected | 41.9 | 1,436 | 0.08 | None | Unsolved points |
Silicon | 37.3 | 1,278 | 0.07 | (100) | Face-centered cubic system | |
Copper | 20.3 | 695 | 0.04 | (100) | Face-centered cubic system | |
Cu2O | 0.5 | 16 | 0.00 | (100) | Primitive cubic system | |
Cu/Si (111) | Not detected | 0.00 | 0 | 0.00 | None | Unsolved points |
Silicon | 64.3 | 2,140 | 0.12 | (111) | Face-centered cubic system | |
Copper | 32.0 | 1,065 | 0.06 | (111) | Face-centered cubic system | |
Cu2O | 3.8 | 125 | 0.01 | (111) | Primitive cubic system | |
Cu/PS/Si (111) | Not detected | 26.0 | 863 | 0.05 | None | Unsolved points |
Silicon | 49.5 | 1,642 | 0.10 | (111) | Face-centered cubic system | |
Copper | 23.2 | 770 | 0.04 | (111) | Face-centered cubic system | |
Cu2O | 1.3 | 42 | 0.00 | (111) | Primitive cubic system |