Figure 3From: Optimum deposition conditions of ultrasmooth silver nanolayersPhase transitions of water. The p-T diagram is calculated with the new sublimation-pressure empirical equation valid in the range from 50 K and 1.9 × 10−40 Pa to temperature and pressure values at the triple point [25]. The sublimation-pressure curve is delineated for pressures ranging from 10−5 Torr down to 10−9 Torr that are achievable in vacuum chambers of physical vapor deposition systems.Back to article page