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Figure 3 | Nanoscale Research Letters

Figure 3

From: Optimum deposition conditions of ultrasmooth silver nanolayers

Figure 3

Phase transitions of water. The p-T diagram is calculated with the new sublimation-pressure empirical equation valid in the range from 50 K and 1.9 × 10−40 Pa to temperature and pressure values at the triple point [25]. The sublimation-pressure curve is delineated for pressures ranging from 10−5 Torr down to 10−9 Torr that are achievable in vacuum chambers of physical vapor deposition systems.

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