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Table 1 AFM scan parameters of 9 × 9 μm 2 area of 30-nm-thick Ag layer

From: Optimum deposition conditions of ultrasmooth silver nanolayers

Ag/Ge/Al2O3 295 K 170 K 140 K 90 K
Ten-point height [nm] 2.04 6.79 50.5 112.3
Average height [nm] 1.73 3.65 40.96 90.88
RMS roughness [nm] 0.49 0.77 9.54 28.30
  1. Thin Ag films were deposited on sapphire substrates with 1-nm Ge wetting layer at different temperatures.