EDS and XRD study results. (a) Representative EDS spectrum of 60-nm-thick AZO overlayer grown on Si nanofacets, showing the presence of Si, Zn, and O. (b) Plot of atomic concentration versus AZO overlayer thickness obtained from EDS analyses. The solid lines are guide to the eyes. (c) X-ray diffractograms of AZO films grown on nanofaceted silicon. The signal corresponding to the 30-nm-thick AZO overlayer is not strong, and therefore, the corresponding diffractogram is not shown here.