Tunable antireflection from conformal Al-doped ZnO films on nanofaceted Si templates

Table 1 Different photovoltaic parameters obtained from various AZO overlayer thicknesses grown on silicon substrates

Sample	J_SC(mA/cm²)	V_OC(V)	FF
30-nm AZO on pristine Si^a	1.24 × 10^-3	0.133	0.142
30-nm AZO on nanofaceted Si	3.0 × 10^-2	0.075	0.279
60-nm AZO on nanofaceted Si	5.35 × 10^-2	0.087	0.361
75-nm AZO on nanofaceted Si	37.57 × 10^-2	0.055	0.252

^aHigher AZO thicknesses (beyond 30 nm) deposited on planar silicon substrate did not show any significant photoresponsivity.