Figure 1From: Effect of In/Al ratios on structural and optical properties of InAlN films grown on Si(100) by RF-MOMBEGrowth sequence of RF-MOMBE and spectrum of a nitrogen RF plasma. (a) Growth sequence of RF-MOMBE pulses for InAlN films. (b) A typical optical emission spectrum of a nitrogen RF plasma at 400 W/0.7 sccm.Back to article page