Figure 4
Normalized Raman spectra of samples A to D. As-deposited Si/SiO2 multilayers (sample A) and samples after annealing with various temperatures (B: 800°C, C: 900°C, D: 1,000°C). The Raman spectra of sample D are decomposed by three components: the crystallized phase component peaked at 516 cm-1 (wine dash line), transition phase 506 cm-1 (cyan dash line), and the amorphous component peaked at 480 cm-1 (magenta dash line).