Figure 5
From: Thermally controlled widening of droplet etched nanoholes
Comparison of linescans and dependence of hole opening diameter, side facet angles and hole depth on t a . (a) Comparison of AFM linescans from an as-grown droplet (ta= 0 s, blue line), a nanohole after droplet etching (ta= 120 s, black line) and a thermally widened large hole (ta= 1,800 s, red line). Dependence of (b) the diameter of the hole opening, (c) the side facet angles at the bottom αb and top αt part of the holes and (d) of the hole depth on the annealing time ta. The dashed line in (b) corresponds to an estimated lateral etching rate of Rth= 0.2 nm/s.